Micropore lesa Perforation Machine fun semikondokito
Iwọn iwọn ila opin micropore ti o kere ju jẹ 5μm, iṣedede iṣiṣẹ gbogbogbo jẹ ± 4μm, iṣedede ẹya agbegbe ko kere ju 3μm, ati iwọn sisẹ jẹ 300 * 300mm..
Ti a lo ni akọkọ fun: iṣelọpọ ohun elo microelectronic, igbaradi awoṣe titẹ, igbaradi biochip, ṣiṣe apẹrẹ pipe, iṣelọpọ awọn ẹya ohun elo pipe
1. Lilo agbara giga-giga ati iduroṣinṣin UV lesa lati taara awọn ohun elo gasification taara, pẹlu iwọn μm-ipele iṣelọpọ ati agbegbe μm ti o ni ipa ooru;
2. Iyara ti o ga julọ ati iṣakoso ti o ga julọ ti iṣipopada tan ina nipasẹ awọn galvanometers ti o wa ni ibamu lati ṣe aṣeyọri ti o ga julọ ti o ni kiakia ti o ni kiakia ti ọna kika micro-iho-pipe;
3. Iyara-giga ati iwọn-giga ti o tobi-kika kika micro-iho ni a rii daju nipasẹ itumọ ti ipilẹ ẹrọ laini iyara giga-giga micron-ipele;
4. Z-axis jẹ adijositabulu itanna lati ṣe deede si awọn ohun elo ti awọn sisanra ti o yatọ ati lati pade awọn ibeere processing taper pato;
5. Kamẹra ile-iṣẹ ti o ga julọ ti o ga julọ ni a lo fun atunṣe aṣiṣe kikun-fireemu ti galvanometer, idojukọ-giga-giga, ati wiwọn ori ayelujara lati rii daju pe iduroṣinṣin igba pipẹ ati deede ti eto naa;
6. Awọn eto gba okuta didan countertops lati mu awọn ìwò iduroṣinṣin ti awọn eto, ati gbogbo darí irinše ti wa ni fara ti yan lati rii daju gun-igba išedede;
7. Iwọn iwọn ila opin micropore ti o kere ju jẹ 5μm, iṣedede iṣiṣẹ gbogbogbo jẹ ± 4μm, iṣedede ẹya agbegbe jẹ kere ju 3μm, ati iwọn sisẹ jẹ 300 * 300mm;
8. O ti wa ni lilo fun konge micromachining ti awọn irin, amọ, silikoni wafers, gilasi, organics ati awọn ohun elo miiran, gẹgẹ bi awọn bulọọgi-iho processing ati konge gige.
Ti a ṣe afiwe pẹlu sisẹ iho micro-EDM, liluho ẹrọ, ipata kemikali, punching darí, ati bẹbẹ lọ, ẹrọ ẹrọ micro-iho konge laser ni awọn anfani wọnyi:
Iyara giga (to awọn iho 4000 fun iṣẹju kan)
Itọkasi giga (<3μm)
Ko si awọn ihamọ ohun elo (awọn irin, awọn ohun elo amọ, awọn wafers silikoni, awọn ohun-ara, ati bẹbẹ lọ)
Ilana iho eto (5μm ti o kere ju, iho taper pato)
Pinpin le jẹ adani (iwọn ilana 300mm * 300mm), ko si mimu ati iboju-boju ti a beere
Ko si idoti ati ko si consumables
taara processing
| Awọn nkan | Paramita | FM-UVM3A | FM-UVM3B |
| Lesa | igbi | 355nm | |
| Agbara | 3W@40kHz (aṣayan 3-40W) | ||
| modulating igbohunsafẹfẹ | 1 ~ 200kHz | ||
| Pulse iwọn | 15ns @ 40kHz | ||
| tan ina didara | 1.2 | ||
| Galvo | Ṣayẹwo agbegbe | 50*50mm | 15*15mm |
| Ipeye atunwi | 1um | ||
| Ipo deede | ≤±3um | ||
| XY tabili | Irin-ajo | 300*300mm (600*600mm iyan) | |
| Ipinnu ipo | 0.1um | ||
| Ipeye atunwi | ≤±1um | ||
| Ipo deede | ≤±3um | ||
| Isare | ≤1G | ||
| Iyara | ≤200mm/s | ||
| Opopona Z | Irin-ajo | 150mm | |
| Ipeye atunwi | ≤±3um | ||
| Ipo deede | ≤±5um | ||
| CCD monitoring aye | Kamẹra | marun-megapiksẹli | |
| Imugo opitika | 10X | ||
| agbegbe splicing | išedede | ± 3μm | |
| Ṣiṣẹda | Aami to kere julọ | 8um | 5um |
| Iho processing išedede | ± 5um | ||
| Ipeye atunwi | ≤±1um | ||
| Awọn ohun elo ti o wa fun ṣiṣe | Gilasi, Organics, awọn irin, awọn ohun elo amọ, ati bẹbẹ lọ. | ||
| GGGGA ohun elo | Igo paipu | ok | dara |
| kú igo | ok | dara | |
| Ṣiṣu igo | ko dara | ok | |
| Awọn baagi asọ | Ko si | ok | |
| Eto itutu | Itutu omi (agbara itutu agbaiye 1500W) | ||
| Ibi ti ina elekitiriki ti nwa | 220V, 50 ~ 60HZ, 1 alakoso tabi adani | ||
| Agbara | ≤2000W | ||
| Iwọn (mm) | 1200 * 1200 * 1900mm | ||
| Ìwúwo (KG) | 1200Kg | ||
Akiyesi: Iwọn otutu igbagbogbo (25 ± 0.5 ℃), gba lẹhin alapapo fun awọn iṣẹju 30
