Micropore Laser Perforation Machine mo semiconductor

Ole laʻititi laʻititi ole gaosiga ole micropore ole 5μm, o le saʻo atoatoa ole gaioiga ole ± 4μm, o le saʻo saʻo ile lotoifale e itiiti ifo i le 3μm, ma le lautele ole gaioiga ole 300 * 300mm..

Fa'aaogaina mo: gaosiga masini eletise, tapenaga fa'ata'ita'iga lomitusi, tapenaga o le biochip, fa'apipi'i sa'o, meafaigāluega sa'o vaega gaosiga.

1. Faʻaaogaina o le laser UV maualuga-maualuga ma le mautu e faʻasaʻo saʻo ai mea gasification, faʻatasi ai ma se μm-level processing aperture ma se μm-level sone afaina vevela;

2. Saosaoa ma maualuga-saosaoa pulea o beam deflection e faaulufale mai saʻo galvanometers e ausia maualuga-saosaoa laiti-faasologa saʻo micro-pu;

3. Saosaoa maualuga ma maualuga-saosaoa tele-format micro-pu e iloa e le faaliliuga o le micron-tulaga maualuga-saosaoa afi afi tulaga;

4. O le Z-axis e mafai ona fetuutuunai eletise e faʻafetaui i mea e eseese mafiafia ma faʻamalieina manaʻoga faʻapitoa mo le gaosiga o pu taper;

5. O le tele axis super-resolution alamanuia mea pueata o loʻo faʻaaogaina mo le faʻasaʻoina o mea sese atoa o le galvanometer, ultra-maualuga-saʻo taulaʻi, ma fua i luga ole laiga e faʻamautinoa ai le tumau umi ma le saʻo o le faiga;

6. O loʻo faʻaogaina e le faiga faʻapipiʻi maamora e faʻaleleia ai le mautu atoa o le faiga, ma o vaega uma o masini e filifilia ma le faʻaeteete ina ia mautinoa le saʻo umi;

7. Ole laʻititi laʻititi ole gaosiga ole micropore ole 5μm, o le faʻasologa atoa o le gaioiga o le ± 4μm, o le saʻo saʻo o le lotoifale e itiiti ifo i le 3μm, ma le lautele ole gaioiga ole 300 * 300mm;

8. E faʻaaogaina mo le micromachining saʻo o metals, ceramics, wafers silicon, tioata, organics ma isi mea, e pei o le micro-hole processing ma le tipi saʻo.

Pe a faʻatusatusa i le EDM micro-hole processing, masini viliina, vailaʻau faʻamaʻi, tuʻi faʻainisinia, ma isi mea, laser saʻo micro-pu machining ei ai tulaga lelei nei:

Saosaoa maualuga (e oo atu i le 4000 pu i le sekone)

Sa'o maualuga (<3μm)

Leai ni mea fa'atapula'a (metala, ceramics, silicon wafers, organics, etc.)

Fa'asologa o pu e mafai ona fa'apolokalameina (la'ititi 5μm, pu taper fa'apitoa)

Tufatufaina e mafai ona fa'avasegaina (fa'agaoioia lautele 300mm * 300mm), leai se limu ma ufimata mana'omia

Leai se filogia ma leai ni mea e fa'aaogaina

faiga tuusao

Fa'aaliga: O le vevela tumau (25±0.5 ℃), maua pe a mae'a fa'avevela mo le 30 minute