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Makina a Micropore Laser Perforation a semiconductor

Kufotokozera Kwachidule:

Ntchito: Galasi, organics, zitsulo, ceramics, etc.

Bowo laling'ono lalitali: 5μm

kulondola: ± 4μm,

Kulondola kwazinthu zam'deralo: <3μm


Tsatanetsatane wa Zamalonda

Zogulitsa Tags

The osachepera processing micropore awiri ndi 5μm, wonse processing kulondola ndi ± 4μm, m'deralo mbali yolondola ndi zosakwana 3μm, ndi m'lifupi processing ndi 300 * 300mm..

Amagwiritsidwa ntchito makamaka pa: kupanga zida zazing'onoting'ono, kukonza template yosindikiza, kukonzekera kwa biochip, kupanga nkhungu mwatsatanetsatane, kupanga zida mwatsatanetsatane

1. Kugwiritsa ntchito mphamvu yamphamvu komanso yokhazikika ya UV laser kuti iwononge mwachindunji zinthu za gasification, ndi μm-level processing aperture ndi malo okhudzidwa ndi kutentha kwa μm;

2. Kuwongolera kothamanga kwambiri komanso kulondola kwapang'onopang'ono kwamitengo kudzera m'magalasi olondola ochokera kunja kuti akwaniritse liwiro laling'ono laling'ono laling'ono;

3. Kuthamanga kwambiri komanso kulondola kwambiri kwa mawonekedwe ang'onoang'ono-bowo kumadziwika ndi kumasulira kwa nsanja yamtundu wa micron-liwiro;

4. Z-olamulira ndi magetsi chosinthika kuti azolowere zipangizo za makulidwe osiyanasiyana ndi kukwaniritsa zofunika taper dzenje processing;

5. Makamera amtundu wa axis super-resolution industry amagwiritsidwa ntchito pokonza zolakwika zonse za galvanometer, ultra-high-precision focusing, ndi kuyeza kwa intaneti kuti zitsimikizire kukhazikika kwa nthawi yaitali ndi kulondola kwa dongosolo;

6. Dongosololi limagwiritsa ntchito mapepala a miyala ya marble kuti apititse patsogolo kukhazikika kwa dongosolo lonse, ndipo zigawo zonse zamakina zimasankhidwa mosamala kuti zitsimikizire kulondola kwa nthawi yayitali;

7. The osachepera processing micropore awiri ndi 5μm, wonse processing kulondola ndi ± 4μm, m'deralo mbali yolondola ndi zosakwana 3μm, ndi m'lifupi processing ndi 300 * 300mm;

8. Amagwiritsidwa ntchito popanga ma micromachining olondola a zitsulo, zoumba, zowotcha za silicon, magalasi, organics ndi zinthu zina, monga kukonza kabowo kakang'ono ndi kudula mwatsatanetsatane.

Poyerekeza ndi EDM yaying'ono pobowo processing, kubowola makina, dzimbiri mankhwala, nkhonya makina, etc., laser mwatsatanetsatane micro-hole Machining ali ndi ubwino zotsatirazi:

Kuthamanga kwambiri (mpaka mabowo 4000 pa sekondi imodzi)

Zolondola kwambiri (<3μm)

Palibe zoletsa zakuthupi (zitsulo, ceramics, silicon wafers, organics, etc.)

Ndondomeko ya dzenje (osachepera 5μm, dzenje lapadera)

Kugawa akhoza makonda (processing m'lifupi 300mm * 300mm), palibe nkhungu ndi chigoba chofunika

Palibe kuipitsa ndipo palibe consumables

kukonza mwachindunji

Zinthu Parameter FM-UVM3A FM-UVM3B
Laser funde 355nm pa
Mphamvu >3W@40kHz (3-40W ngati mukufuna)
modulating frequency 1-200 kHz
Kugunda m'lifupi 15ns@40kHz
mtengo wamtengo <1.2
Galvo Sikani malo <50*50mm <15*15mm
Kubwerezabwereza kulondola <1um
Kuyika kulondola ≤±3um
XY tebulo Ulendo 300 * 300mm (600 * 600mm)
Position resolution 0.1uwu
Kubwerezabwereza kulondola ≤±1um
Kuyika kulondola ≤±3um
Kuthamanga ≤1G
Liwiro ≤200mm/s
Z axis Ulendo 150 mm
Kubwerezabwereza kulondola ≤±3um
Kuyika kulondola ≤± 5um

Kuwunika kwa CCD

Kamera 5 megapixel
Kukulitsa kwa kuwala 10x pa
chigawo splicing kulondola ±3μm
Kukonza Malo ochepa 8m ku 5 umm
Hole processing kulondola ±5 uwu
Kubwerezabwereza kulondola ≤±1um
Zida zomwe zilipo zopangira Galasi, organics, zitsulo, ceramics, etc.
GGGGA ntchito Botolo la bomba ok zabwino
botolo la ufa ok zabwino
Botolo la pulasitiki zosakhala bwino ok
Matumba ofewa Palibe ok
Dongosolo lozizira Madzi ozizira (1500W kuzirala mphamvu)
Magetsi 220V, 50 ~ 60HZ, 1 gawo kapena makonda
Mphamvu ≤2000W
Kuyeza (mm) 1200*1200*1900mm
Kulemera (KG) 1200Kg

Chidziwitso: Kutentha kosalekeza (25 ± 0.5 ℃), komwe kumapezeka mutatha kutentha kwa mphindi 30


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