18 Years Factory Wire Edm - Micropore Laser Perforation Machine for semiconductor – FOREST
18 Years Factory Wire Edm - Micropore Laser Perforation Machine for semiconductor – FOREST Detail:
The minimum processing micropore diameter is 5μm, the overall processing accuracy is ±4μm, the local feature accuracy is less than 3μm, and the processing width is 300*300mm. .
Mainly used for: microelectronic device manufacturing, printing template preparation, biochip preparation, precision mold forming, instrumentation precision parts manufacturing
1. Using high-power and high-stability UV laser to directly ablate the gasification material, with a μm-level processing aperture and a μm-level heat-affected zone;
2. High-speed and high-precision control of beam deflection through imported precision galvanometers to achieve high-speed small-format precision micro-hole processing;
3. High-speed and high-precision large-format micro-hole processing is realized by the translation of the micron-level high-speed linear motor platform;
4. The Z-axis is electrically adjustable to adapt to materials of different thicknesses and to meet specific taper hole processing requirements;
5. The range axis super-resolution industrial camera is used for full-frame error correction of the galvanometer, ultra-high-precision focusing, and online measurement to ensure the long-term stability and accuracy of the system;
6. The system adopts marble countertops to improve the overall stability of the system, and all mechanical components are carefully selected to ensure long-term accuracy;
7. The minimum processing micropore diameter is 5μm, the overall processing accuracy is ±4μm, the local feature accuracy is less than 3μm, and the processing width is 300*300mm;
8. It is used for precision micromachining of metals, ceramics, silicon wafers, glass, organics and other materials, such as micro-hole processing and precision cutting.
Compared with EDM micro-hole processing, mechanical drilling, chemical corrosion, mechanical punching, etc., laser precision micro-hole machining has the following advantages:
High speed (up to 4000 holes per second)
High precision (<3μm)
No material restrictions (metals, ceramics, silicon wafers, organics, etc.)
Programmable hole pattern (minimum 5μm, specific taper hole)
Distribution can be customized (processing width 300mm*300mm), no mold and mask required
No pollution and no consumables
direct processing
| Items | Parameter | FM-UVM3A | FM-UVM3B |
| Laser | wave | 355nm | |
| Power | ＞3W@40kHz （3-40W optional） | ||
| modulating frequency | 1~200kHz | ||
| Pulse width | 15ns@40kHz | ||
| beam quality | ＜1.2 | ||
| Galvo | Scan area | ＜50*50mm | ＜15*15mm |
| Repeatability accuracy | ＜1um | ||
| Positioning accuracy | ≤±3um | ||
| X Y tables | Travel | 300*300mm （600*600mm optional） | |
| Positioning resolution | 0.1um | ||
| Repeatability accuracy | ≤±1um | ||
| Positioning accuracy | ≤±3um | ||
| Acceleration | ≤1G | ||
| Speed | ≤200mm/s | ||
| Z axis | Travel | 150mm | |
| Repeatability accuracy | ≤±3um | ||
| Positioning accuracy | ≤±5um | ||
|
CCD monitoring positioning |
Camera | five-megapixel | |
| Optical magnification | 10X | ||
| region splicing | accuracy | ±3μm | |
| Processing | Minimum spot | 8um | 5um |
| Hole processing accuracy | ±5um | ||
| Repeatability accuracy | ≤±1um | ||
| Available materials for procesing | Glass, organics, metals, ceramics, etc. | ||
| GGGGApplication | Pipe bottle | ok | good |
| die bottle | ok | good | |
| Plastic bottle | not good | ok | |
| Soft bags | No available | ok | |
| Coolant system | Water coolant (1500W cooling capacity ) | ||
| Power supply | 220V, 50~60HZ, 1 phase or customized | ||
| Power | ≤2000W | ||
| Measure(mm) | 1200*1200*1900mm | ||
| Weight (KG) | 1200Kg | ||
Note: Constant temperature (25±0.5℃), obtained after preheating for 30 minutes
Product detail pictures:
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We thinks what buyers think, the urgency of urgency to act during the interests of a purchaser position of theory, allowing for much better high-quality, reduced processing costs, charges are more reasonable, won the new and outdated consumers the support and affirmation for 18 Years Factory Wire Edm - Micropore Laser Perforation Machine for semiconductor – FOREST, The product will supply to all over the world, such as: Guyana, Singapore, Turkey, As a way to use the resource on the expanding info in international trade, we welcome prospects from everywhere on the web and offline. In spite on the high quality items we offer, effective and satisfying consultation service is supplied by our qualified after-sale service group. Item lists and detailed parameters and any other info weil be sent to you timely for the inquiries. So please make contact with us by sending us emails or call us when you've got any questions about our organization. ou could also get our address information from our site and come to our enterprise. We get a field survey of our merchandise. We are confident that we'll share mutual accomplishment and create solid co-operation relations with our companions within this market place. We're seeking forward for your inquiries.
By Nora from Hungary - 2018.10.31 10:02
This company can be well to meet our needs on product quantity and delivery time, so we always choose them when we have procurement requirements.
By Belinda from Serbia - 2017.06.22 12:49
